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Dr. Siyuan He

Siyuan He
BSc, MASc, PhD, PEng
416-979-5000 ext. 556425

Areas of Academic Interest

Microelectromechanical systems


Light detection and ranging

Power harvesting

Piezoelectric motor


Year University Degree
2005 University of Toronto PhD
1998 Harbin Institute of Technology PhD
1995 Harbin Institute of Technology MASc
1993 Harbin Institute of Technology BSc

Selected Courses

Course Code Course
MEC 733 Microprocessor Systems
MEC 809 Integrated Manufacturing
ME8146 Microelectromechanical Systems (MEMS)


Imagine making a device so small that you can’t see it in the palm of your own hand. That’s what Siyuan He does in fabricating and testing microelectromechanical systems (MEMS). His devices typically range in size from a few to about a hundred micrometres – the diameter of a single hair – while integrating electrical, mechanical, optical and fluid engineering systems.

Within that tiny scale lie vast possibilities. For example, MEMS technology in vehicle air bag systems has made it possible to shrink the components from about the size of a hockey puck to a fingernail and cut the cost from hundreds to a few dollars each. Additional applications include biochips to detect hazardous agents, blood pressure monitoring, motion sensors in smartphones and many others.

He is most excited by his work in autonomous vehicles. “Combining MEMS with LIDAR –light detection and ranging – makes it possible to reduce the size and cost of navigation systems while recognizing objects more clearly and accurately. Both safety and quality are much higher.” With MEMS now joining forces with nanosystems (NEMS), the future is infinitesimally thrilling.

Siyuan He

“Students love getting in the clean-room lab to fabricate these fantastic tiny systems.”

  • Microelectromechanical Systems (MEMS) and Mechatronics Laboratory