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MTE 711

Fundamentals of Microelectromechanical Systems

The course is designed to provide students with fundamental knowledge of Microelectromechanical Systems (MEMS). Topics covered include: Introduction to MEMS; fabrication technology and commercial processes; analysis, modeling and design of MEMS actuators; analysis, modelling and design of MEMS sensors; optical MEMS design and applications; RF MEMS design and applications; BioMEMS devices; and introduction to MEMS design, modelling and simulation software.
Weekly Contact: Lab: 1 hr. Lecture: 3 hrs.
GPA Weight: 1.00
Course Count: 1.00
Billing Units: 1





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